Influence of conventional furnace and rapid thermal annealing on the quality of polycrystalline β-FeSi2 thin films grown from vapor-deposited Fe/Si multilayers

✍ Scribed by D.H. Tassis; C.A. Dimitriadis; S. Boultadakis; J. Arvanitidis; S. Ves; S. Kokkou; S. Logothetidis; O. Valassiades; P. Poulopoulos; N.K. Flevaris

• Book ID: 108389207
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 670 KB
• Volume: 310
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(97)00373-8