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Influence of composition and molecular weight characteristics of methacrylic copolymers on their sensitivity to extreme ultraviolet radiation

✍ Scribed by S. A. Bulgakova; I. P. Ivanov; A. Ya. Lopatin; L. M. Mazanova


Book ID
110202927
Publisher
Pleiades Publishing
Year
2008
Tongue
English
Weight
167 KB
Volume
2
Category
Article
ISSN
1027-4510

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