Influence of Ar pressure on r.f. magnetron-sputtered Ca5(PO4)3OH layers

✍ Scribed by K. van Dijk; H.G. Schaeken; C.H.M. Marée; J. Verhoeven; J.C.G. Wolke; F.H.P.M. Habraken; J.A. Jansen

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 443 KB
• Volume: 76-77
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(95)02590-1