Influence of oxygen content on the 1.54&
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G. Wora Adeola; H. Rinnert; M. Vergnat
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Article
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2009
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Elsevier Science
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English
⚖ 282 KB
Er-doped amorphous SiO x thin films with different oxygen contents (0pxp2) were prepared by co-evaporation of Si and SiO 2 . The evolution of the structure of the annealed films was followed by infrared absorption spectrometry. With annealing treatment, a phase separation process occurs, leading to