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Influence of annealing condition on the properties of sputtered hafnium oxide

โœ Scribed by Seok-Woo Nam; Jung-Ho Yoo; Suheun Nam; Hyo-Jick Choi; Dongwon Lee; Dae-Hong Ko; Joo Ho Moon; Ja-Hum Ku; Siyoung Choi


Book ID
117145739
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
695 KB
Volume
303
Category
Article
ISSN
0022-3093

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