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Influence of ammonium molybdate precursor on Mo powder preparation and working properties

✍ Scribed by Yuanjun Sun; Hui Xie; Jun Sun

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
791 KB
Volume
483-484
Category
Article
ISSN
0921-5093

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## Arc ion plating Magnetron sputtering Substrate bias voltage Cr-Mo-Si-N coatings were prepared on Si wafer by a hybrid coating system combining arc ion plating and magnetron sputtering at the substrate bias voltage ranging from 0 to -400 V. The results showed that the deposition rate, film micro