Profiling of traps in SiO2/Al2O3 gate st
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Isodiana Crupi; Robin Degraeve; Bogdan Govoreanu; David P. Brunco; Philippe Rous
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Article
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2006
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Elsevier Science
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English
β 132 KB
In this paper, we present our results on the distribution and generation of traps in a SiO 2 /Al 2 O 3 transistor. The investigation has been carried out by using charge pumping measurements, both variable voltage and frequency techniques, and constant voltage stress. By increasing the amplitude of