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Influence of Al2O3 dielectrics on the trap-depth profiles in MOS devices investigated by the charge-pumping method

✍ Scribed by Jakschik, S.; Avellan, A.; Schroeder, U.; Bartha, J.W.


Book ID
114617663
Publisher
IEEE
Year
2004
Tongue
English
Weight
200 KB
Volume
51
Category
Article
ISSN
0018-9383

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In this paper, we present our results on the distribution and generation of traps in a SiO 2 /Al 2 O 3 transistor. The investigation has been carried out by using charge pumping measurements, both variable voltage and frequency techniques, and constant voltage stress. By increasing the amplitude of