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Influence of Adsorbed Species on the Reconstruction of 4H−SiC(0001) Surfaces

✍ Scribed by Olander, J.; Larsson, K.


Book ID
127154720
Publisher
American Chemical Society
Year
2001
Tongue
English
Weight
69 KB
Volume
105
Category
Article
ISSN
0022-3654

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Effects of ozone treatment of 4H–SiC(000
✍ R Kosugi; S Ichimura; A Kurokawa; K Koike; K Fukuda; S Suzuki; H Okushi; S Yoshi 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 131 KB

## Ž . Ž . The effects of high-concentration ozone gas ; 25% exposure at atmospheric pressure with and without ultraviolet UV Ž . Ž . irradiation to a 4H-SiC 0001 surface has been investigated by X-ray photoelectron spectroscopy XPS . The C 1s XPS spectrum for the 4H-SiC surface after standard RC