✦ LIBER ✦
Influence du vieillissement d'une solution renfermant un polystyrène silicié et un sel de triarylsulfonium sur le pourcentage de coupure des liaisons OSi sous irradiation ultraviolette et en couche mince
✍ Scribed by Bonfils, Frédéric ;Giral, Louis ;Montginoul, Claude ;Sagnes, René ;Schué, Fran??ois
- Publisher
- Wiley (John Wiley & Sons)
- Year
- 1992
- Weight
- 595 KB
- Volume
- 193
- Category
- Article
- ISSN
- 0025-116X
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✦ Synopsis
Abstract
Upon treatment with ultraviolet irradiation (wavelength λ = 254 nm) the resist containing both poly(p‐trialkylsiloxystyrene) and a triarylsulfonium salt undergoes photoinduced structural modifications which convert the silylated polymer into either poly(p‐hydroxystyrene) or poly[(p‐trialkylsioxystyrene)‐co‐(p‐hydroxystyrene)]. Aging with the use of antimonate salts rather than arsenate salts, and bulky alkyl groups favour OSi bond cleavage.