Industrial Ion Sources (Broadbeam Gridless Ion Source Technology) || Ion Beam and Radiation Impact on Substrate Heating

✍ Scribed by Zhurin, Viacheslav V.

• Book ID: 119955774
• Publisher: Wiley-VCH Verlag GmbH & Co. KGaA
• Year: 2011
• Tongue: German
• Weight: 177 KB
• Edition: 1
• Category: Article
• ISBN: 3527410295
• DOI: 10.1002/9783527635726.ch8