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Inductively coupled r.f. plasma assisted chemical vapour deposition of diamond-like carbon coatings

✍ Scribed by Vanhulsel, A.; Celis, J.-P.; Dekempeneer, E.; Meneve, J.; Smeets, J.; Vercammen, K.


Book ID
121276892
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
146 KB
Volume
8
Category
Article
ISSN
0925-9635

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