Inductively coupled plasma etching for large format HgCdTe focal plane array fabrication

✍ Scribed by E. P. G. Smith; G. M. Venzor; M. D. Newton; M. V. Liguori; J. K. Gleason; R. E. Bornfreund; S. M. Johnson; J. D. Benson; A. J. Stoltz; J. B. Varesi; J. H. Dinan; W. A. Radford

• Book ID: 107453322
• Publisher: Springer US
• Year: 2005
• Tongue: English
• Weight: 627 KB
• Volume: 34
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-005-0014-8