✦ LIBER ✦
Individual wafer metallization utilizing load-locked, closecoupled conical magnetron sputtering : Vance E. Hoffman and Helen M. Chang. Solid-St. Technol.105 (February 1981)
- Publisher
- Elsevier Science
- Year
- 1981
- Tongue
- English
- Weight
- 131 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0026-2714
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