✦ LIBER ✦
Indirectly heated micro-electrothermal actuator with a monolithically integrated displacement sensor
✍ Scribed by Kongying Xie; Yongjun Lai
- Book ID
- 106185773
- Publisher
- Springer-Verlag
- Year
- 2009
- Tongue
- English
- Weight
- 471 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0946-7076
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