✦ LIBER ✦
Independent control of ion density and ion bombardment energy in a dual RF excitation plasma : Haruhiro Harry Goto et al. IEEE Transactions on Semiconductor Manufacturing, 6(1), 58 (1993)
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 87 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.