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Increasing the Dynamic Range of a Micromechanical Moving-Plate Capacitor

✍ Scribed by J. M. Kyynäräinen; A. S. Oja; H. Seppä

Book ID: 110298756
Publisher: Springer
Year: 2001
Tongue: English
Weight: 262 KB
Volume: 29
Category: Article
ISSN: 0925-1030
DOI: 10.1023/a:1011230330035

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