Increasing profitability and improving semiconductor manufacturing throughput using expert systems

✍ Scribed by Khera, D.; Cresswell, M.W.; Linholm, L.W.; Ramanathan, G.; Buzzeo, J.; Nagarajan, A.

• Book ID: 114539173
• Publisher: IEEE
• Year: 1994
• Tongue: English
• Weight: 994 KB
• Volume: 41
• Category: Article
• ISSN: 0018-9391
• DOI: 10.1109/17.293381