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Incorporation of N in TiO2 films grown by DC-reactive magnetron sputtering

✍ Scribed by S. Sério; M.E. Melo Jorge; Y. Nunes; N.P. Barradas; E. Alves; F. Munnik

Book ID: 113823573
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 484 KB
Volume: 273
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2011.07.052

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