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Incorporating design rules into the LIGA technology applied to a fourier transformation spectrometer

✍ Scribed by C. Solf; A. Janssen; J. Mohr; A. Ruzzu; U. Wallrabe

Book ID: 106184708
Publisher: Springer-Verlag
Year: 2004
Tongue: English
Weight: 405 KB
Volume: 10
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-004-0406-3

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