Incident ion energy spectrum and target sputtering rate in dc planar magnetron

✍ Scribed by D Czekaj; B Goranchev; EK Hollmann; VA Volpyas; AG Zaytsev

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 306 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)90075-t