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Incident angle dependence of the sputtering effect of Ar-cluster-ion bombardment

✍ Scribed by H. Kitani; N. Toyoda; J. Matsuo; I. Yamada


Book ID
114168465
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
347 KB
Volume
121
Category
Article
ISSN
0168-583X

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