In situ XPS analysis of the tungsten/sublayer interface after SF6 based reactive ion etching

✍ Scribed by N. Couchman; C. Pacifico; G. Turban; B. Grolleau

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 334 KB
• Volume: 70-71
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(93)90589-4