✦ LIBER ✦
In situ X-ray diffraction study of self-forming barriers from a Cu–Mn alloy in 100 nm Cu/low-k damascene interconnects using synchrotron radiation
✍ Scribed by Christopher J. Wilson; Henny Volders; Kristof Croes; Marianna Pantouvaki; Gerald P. Beyer; Alton B. Horsfall; Anthony G. O’Neill; Zsolt Tőkei
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 417 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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