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In situ study of film stress and kinetics of platinum silicide formation on silicon

✍ Scribed by J.T. Pan; I.A. Blech

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 458 KB
Volume: 113
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(84)90021-x

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