In-situ stress investigations on thin copper films with the STM

✍ Scribed by Dr. Thomas Fries; Dr. Klaus Oster; Dr. Klaus Wandelt

• Publisher: John Wiley and Sons
• Year: 1994
• Tongue: English
• Weight: 467 KB
• Volume: 6
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.19940060606