In situ SEM indentation experiments: Instruments, methodology, and applications

✍ Scribed by Rudy Ghisleni; Karolina Rzepiejewska-Malyska; Laetitia Philippe; Patrick Schwaller; Johann Michler

• Book ID: 102334211
• Publisher: John Wiley and Sons
• Year: 2009
• Tongue: English
• Weight: 261 KB
• Volume: 72
• Category: Article
• ISSN: 1059-910X
• DOI: 10.1002/jemt.20677

✦ Synopsis

Abstract

The purpose of this article is to present the design and capabilities of two in situ scanning electron microscope (SEM) indentation instruments covering a large load range from μN to N. The capabilities and advantages of in situ SEM indentation are illustrated by two applications: indentation of a thin film and a nanowire. All the experiments were performed on electrodeposited cobalt, whose outstanding magnetic properties make it a candidate material for MEMS and NEMS devices. Microsc. Res. Tech., 2009. © 2009 Wiley‐Liss, Inc.