✦ LIBER ✦
In Situ Reflective High-Energy Electron Diffraction Analysis During the Initial Stage of a Trimethylaluminum/Water ALD Process
✍ Scribed by R. Bankras; J. Holleman; J. Schmitz; M. Sturm; A. Zinine; H. Wormeester; B. Poelsema
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 326 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0948-1907
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