𝔖 Bobbio Scriptorium
✦   LIBER   ✦

In situ Raman and second harmonic generation studies

✍ Scribed by Bruno Pettinger; Andreas Friedrich; Curtis Shannon

Book ID
107749902
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
610 KB
Volume
36
Category
Article
ISSN
0013-4686

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Oxide interface studies using second har
Oxide interface studies using second harmonic generation
✍ N.H. Tolk; M.L. Alles; R. Pasternak; X. Lu; R.D. Schrimpf; D.M. Fleetwood; R.P. πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 684 KB

We report experiments using a non-invasive second harmonic generation (SHG) technique to characterize buried Si/SiO 2 interfaces and also SIMOX thin film silicon-on-insulator (SOI) wafers. The measurements demonstrate that the SHG response can provide an indication of the quality of the buried oxide