✦ LIBER ✦
In situ quadrupole mass spectroscopy studies of water and solvent coordination to copper(II) β-diketonate precursors: implications for the chemical vapor deposition of copper
✍ Scribed by Bo Zheng; Cindy Goldberg; Eric T. Eisenbraun; Jun Liu; Alain E. Kaloyeros; Paul J. Toscano; Shyam P. Murarka; James F. Loan; John Sullivan
- Book ID
- 113300519
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 941 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0254-0584
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