✦ LIBER ✦
In situ pumping with NEG (non-evaporable getters) during vacuum processing
✍ Scribed by F Sciuccati; B Ferrario; G Gasparini; L Rosai
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 679 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0042-207X
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