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In situ preparation of high dielectric constant, low-loss ferroelectric BaTiO3 films on Si at 500°C

✍ Scribed by Yuan, Meiling; Zhang, Wei; Wang, Xianyang; Pan, Wei; Wang, Li; Ouyang, Jun

Book ID: 121403055
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 523 KB
Volume: 270
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2013.01.023

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