Crystal defects of GaAs thin films deposited by metalorganic vapour phase epitaxy on high-quality Ge substrates are studied by synchrotron X-ray topography. The GaAs thin films were measured to have % 500 dislocations cm À2 , which is a similar number to what plain Ge substrates show. The dislocatio
✦ LIBER ✦
In-situ optical reflectance and synchrotron X-ray topography study of defects in epitaxial dilute GaAsN on GaAs
✍ Scribed by O. Reentilä; A. Lankinen; M. Mattila; A. Säynätjoki; T. O. Tuomi; H. Lipsanen; L. O’Reilly; P. J. McNally
- Book ID
- 106397778
- Publisher
- Springer US
- Year
- 2007
- Tongue
- English
- Weight
- 366 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0957-4522
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