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In-situ observations of ion implanted surfaces

โœ Scribed by G.J. Thomas; W. Bauer


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
534 KB
Volume
63
Category
Article
ISSN
0022-3115

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Polyethylene (PE) film was implanted with 1000-keV Ar / ions to a fluence of 5 1 10 14 ions/cm 2 under high vacuum conditions (2.5 1 10 06 torr) and the film surface was investigated by means of microhardness and microwear measurements, and FTIR/ATR, Raman, and XPS techniques. Ion implantation signi