✦ LIBER ✦
In-situ multi-dimensional observation of masklessly implanted sites using MeV heavy ion microprobes
✍ Scribed by Yoshiaki Mokuno; Yuji Horino; Akiyoshi Chayahara; Masato Kiuchi; Kanenaga Fujii; Mamoru Satou; Mikio Takai
- Book ID
- 113284176
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 633 KB
- Volume
- 77
- Category
- Article
- ISSN
- 0168-583X
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