✦ LIBER ✦
In-situ monitoring of MOVPE growth with reflectance anisotropy spectroscopy in an industrial used multi wafer reactor
✍ Scribed by C. Krahmer; M. Philippens; M. Schubert; K. Streubel
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 232 KB
- Volume
- 3
- Category
- Article
- ISSN
- 1862-6351
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