In situ monitoring of film deposition with an ellipsometer based on a four-detector photopolarimeter

✍ Scribed by Masetti, E. ;Montecchi, M. ;Larciprete, R. ;Cozzi, S.

• Book ID: 115345461
• Publisher: The Optical Society
• Year: 1996
• Tongue: English
• Weight: 370 KB
• Volume: 35
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.35.005626