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In situ monitoring for development of rectangular photoresist gratings on transparent substrates

✍ Scribed by Wei, Shiming ;Li, Lifeng

Book ID: 115354864
Publisher: The Optical Society
Year: 2010
Tongue: English
Weight: 862 KB
Volume: 49
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.49.000430

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