✦ LIBER ✦
In situ microwave characterisation of medium-k hfo2 and high-k srtio3 dielectrics for metal-insulator-metal capacitors integrated in back-end of line of integrated circuits
✍ Scribed by Vo, T.T.; Lacrevaz, T.; Bermond, C.; Bertaud, T.; Flechet, B.; Farcy, A.; Morand, Y.; Blonkowski, S.; Torres, J.; Guigues, B.; Defay, E.
- Book ID
- 117812449
- Publisher
- The Institution of Engineering and Technology
- Year
- 2008
- Tongue
- English
- Weight
- 436 KB
- Volume
- 2
- Category
- Article
- ISSN
- 1751-8725
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