✦ LIBER ✦
In-situ metrology and testing of nanotwinned copper pillars for potential air gap applications
✍ Scribed by Vinay Sriram; Jenn-Ming Yang; Jia Ye; Andrew M. Minor
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 526 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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