In situ measurements of sensor film dynamics by spectroscopic ellipsometry. Demonstration of back-side measurements and the etching of indium tin oxide

✍ Scribed by I Zudans; C.J Seliskar; W.R Heineman

• Book ID: 108388593
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 162 KB
• Volume: 426
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(03)00029-4