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In situ measurement of the metalorganic and hydride partial pressures in a MOCVD reactor using ultraviolet absorption spectroscopy

✍ Scribed by G.A. Hebner; K.P. Killeen; R.M. Biefeld

Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
800 KB
Volume
98
Category
Article
ISSN
0022-0248

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