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In-situ measurement of stress for Co-based superlattices during fabrication by rf-sputtering

✍ Scribed by K. Hattori; H. Akimoto; T. Sugimoto; K. Nakagawa; A. Itoh

Book ID: 113318370
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 204 KB
Volume: 126
Category: Article
ISSN: 0304-8853
DOI: 10.1016/0304-8853(93)90689-y

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