✦ LIBER ✦
In situ measurement of nanoparticles formed in an rf plasma-enhanced chemical vapor deposition reactor using a very low-pressure differential mobility analyzer
✍ Scribed by Kwang Soo Seol; Yasuyuki Tsutatani; Toshiyuki Fujimoto; Yoshiki Okada; Kazuo Takeuchi
- Book ID
- 117129809
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 690 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0021-8502
No coin nor oath required. For personal study only.