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In-situ low temperature growth and orientation control in MOCVD PZT/RuO 2 thin film heterostructures on SiO 2 /Si substrates

✍ Scribed by Bai, G. R.; Wang, A.; Tsu, I-Fei; Foster, C. M.; Auciello, O.

Book ID: 127299605
Publisher: Taylor and Francis Group
Year: 1998
Tongue: English
Weight: 786 KB
Volume: 21
Category: Article
ISSN: 1058-4587
DOI: 10.1080/10584589808202071

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