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In-situ investigation of the growing a-Si:D surface by infrared reflection absorption spectroscopy

โœ Scribed by Yasutake Toyoshima; Akihisa Matsuda; Kazuo Arai


Book ID
115988955
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
341 KB
Volume
164-166
Category
Article
ISSN
0022-3093

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