In-Situ Infrared Spectroscopy and Density Functional Theory Modeling of Hafnium Alkylamine Adsorption on Si−OH and Si−H Surfaces

✍ Scribed by Kelly, M. Jason; Han, Joseph H.; Musgrave, Charles B.; Parsons, Gregory N.

• Book ID: 126329833
• Publisher: American Chemical Society
• Year: 2005
• Tongue: English
• Weight: 460 KB
• Volume: 17
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm051064h