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In-Situ FTIR Studies of Reactions at the Silicon/Liquid Interface: Wet Chemical Etching of Ultrathin SiO2 on Si(100)†

✍ Scribed by Queeney, K. T.; Fukidome, H.; Chaban, E. E.; Chabal, Y. J.


Book ID
115518991
Publisher
American Chemical Society
Year
2001
Tongue
English
Weight
86 KB
Volume
105
Category
Article
ISSN
0022-3654

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