✦ LIBER ✦
In situ film thickness measurement and gaseous species detection in diamond CVD processes using FTIR emission spectroscopy
✍ Scribed by S. Jin; L. Bourget; E. Sevillano
- Book ID
- 107930412
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 291 KB
- Volume
- 68-69
- Category
- Article
- ISSN
- 0257-8972
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