𝔖 Bobbio Scriptorium
✦   LIBER   ✦

In situ ellipsometry for real-time feedback control of oxidation furnaces

✍ Scribed by C. Schneider; R. Berger; L. Pfitzner; H. Ryssel

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
396 KB
Volume
63
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Real-time computation of feedback contro
Real-time computation of feedback controls for constrained optimal control problems. part 1: Neighbouring extremals
✍ Hans Josef Pesch πŸ“‚ Article πŸ“… 1989 πŸ› John Wiley and Sons 🌐 English βš– 784 KB

A numerical method is developed for the real-time computation of neighbouring optimal feedback controls for constrained optimal control problems. The first part of this paper presents the theory of neighbouring extremals. Besides a survey of the theory of neighbouring extremals, special emphasis is

In-Situ Optical Pyrometry in the CVD of
In-Situ Optical Pyrometry in the CVD of Metallic Thin Films for Real Time Control of the Growth
✍ C. Gasqueres; F. Maury; F. Ossola πŸ“‚ Article πŸ“… 2003 πŸ› John Wiley and Sons 🌐 English βš– 273 KB πŸ‘ 1 views

## Abstract In‐situ temperature measurement is essential in CVD in order to control the temperature of the growing films. This is frequently achieved by optical pyrometry because it is a sensitive, convenient, and inexpensive technique that can be used in corrosive atmospheres. In this work, in‐sit