✦ LIBER ✦
In situ ellipsometry comparison of the nucleation and growth of sputtered and glow-discharge a-Si:H: R W Collins and J M Cavese, J appl Phys, 62, 1987, 4146–4153
- Book ID
- 103466208
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 156 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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